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Metal Corrosion of Al-Si-Cu Pattern Wafer Due to Chloride Ion Contaminants
Airborne molecular contaminants (AMCs) Chloride contamination Cleanroom micro-contamination HCl Pattern wafer Semiconductor device
2016/3/28
Chloride ions (Cl–) induce metal corrosion of integrated circuits and cause wafer scrap events in the clean room
environment. In this study, Al-Si-Cu pattern wafers were designed to monitor critical ...
Preservation Artifacts and Loss Pattern of Arsenic: A Case Study from Highly Contaminated Location in Central-East India
Arsenic Groundwater Contamination Preservation Loss Pattern Chhattisgarh
2013/3/13
Arsenic is the focus of public attention because of its wider prevalence and toxicity. Proper sampling is important in characterizing toxic water contaminants in the groundwater. The present paper stu...
A laboratory feasibility study on a new electrokinetic nutrient injection pattern and bioremediation of phenanthrene in a clayey soil
Bioremediation Electrokinetic Ion injection Nutrients Phenanthrene
2013/12/12
Electrokinetic (EK) injection has recently been proposed to supply nutrients and electron acceptors inbioremediation of low permeable soils. However, effective pH control and uniform injection of inor...
A New Collaborative Pattern between Landscape Architects and Urban Designers in Environmental Design
Urban design landscape architecture environmental design urban environment
2010/12/22
Problem statement: Nowadays professions such as architecture, landscape architecture and urban design are playing a unique role in environmental design process. Meanwhile architecture is being separat...